Title:
ガスクラスターイオンビーム装置、分析装置
Document Type and Number:
Japanese Patent JP7179661
Kind Code:
B2
Abstract:
An analyzing apparatus (12b, 12c) includes a sample chamber (62, or 72), a measurement apparatus (60 and 70), and a gas cluster ion beam apparatus (2). A cooling body (18) separates an ionization chamber (14) of the gas cluster ion beam apparatus (2) from a nozzle support (13) to prevent heat emitted by an ionization filament (23) from being transmitted to the nozzle support (13), and a temperature of a source gas emitted from a nozzle (17) is kept at a constant temperature by a gas heating device (15) while a sputtering rate is kept constant. A pressure of the source gas supplied to the nozzle (17) is kept at constant pressure by a pressure controller (10), and a size of gas cluster ions is kept at a constant value. Because the sputtering rate is a constant value, highly accurate depth surface profiling can be performed.
Inventors:
Mao Sogo
Sanzui Hiromichi
Daisuke Sakai
Katsumi Watanabe
Sanzui Hiromichi
Daisuke Sakai
Katsumi Watanabe
Application Number:
JP2019061228A
Publication Date:
November 29, 2022
Filing Date:
March 27, 2019
Export Citation:
Assignee:
ULVAC PHI Co., Ltd.
International Classes:
H01J27/20; G01N23/2202; G01N23/2273; H01J27/02; H01J37/08; H01J37/30
Domestic Patent References:
| JP2000087227A | ||||
| JP2003505867A | ||||
| JP2003527614A | ||||
| JP2008116363A | ||||
| JP2010245043A |
Other References:
Hagena O. F. et al.,Cluster Formation in Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size, and Test Gas,The Journal of Chemical Physics,米国,American Institute of Physics,1972年,56・5,1793-1802
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office
Junichi Omori
Takahashi Mitsuru
Teppei Nakamura
Hibino Yukinobu
Junichi Omori
Takahashi Mitsuru
Teppei Nakamura
Hibino Yukinobu