PURPOSE: To provide a gas cylinder cooler for the production of semiconductors which enables the checking of cost of the cooler remarkably and moreover, the reducing of complicated maintenance work.
CONSTITUTION: A cooling jacket 5A is fitted into a cylinder 2 for storing a liquefied gas surrounding it. With the jetting of compressed air for cooling into the cooling jacket 5A, air is made to pass through a spiral passage pipe within the cooling jacket 5A to cool the cylinder 2 from the bottom to top. Thereafter, the air is discharged outside to meet a relationship of temperature< ambient temperature of supply line of the cylinder 2. This enables the prevention of a gas for the production of semiconductors from stagnating in the supply line associated with a difference in the temperature in the perimeter of the cylinder 2, a semiconductor production apparatus or the supply line thereby holding back the cost of the cooler significantly while reducing burden from complicated maintenance work.
Next Patent: DISPENSER