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Patent Searching and Data


Title:
GAS CYLINDER COOLER FOR PRODUCTION OF SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPH06294566
Kind Code:
A
Abstract:

PURPOSE: To provide a gas cylinder cooler for the production of semiconductors which enables the checking of cost of the cooler remarkably and moreover, the reducing of complicated maintenance work.

CONSTITUTION: A cooling jacket 5A is fitted into a cylinder 2 for storing a liquefied gas surrounding it. With the jetting of compressed air for cooling into the cooling jacket 5A, air is made to pass through a spiral passage pipe within the cooling jacket 5A to cool the cylinder 2 from the bottom to top. Thereafter, the air is discharged outside to meet a relationship of temperature< ambient temperature of supply line of the cylinder 2. This enables the prevention of a gas for the production of semiconductors from stagnating in the supply line associated with a difference in the temperature in the perimeter of the cylinder 2, a semiconductor production apparatus or the supply line thereby holding back the cost of the cooler significantly while reducing burden from complicated maintenance work.


Inventors:
YOKOKI KAZUO
Application Number:
JP7961693A
Publication Date:
October 21, 1994
Filing Date:
April 06, 1993
Export Citation:
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Assignee:
TEISAN KK
International Classes:
F25D1/00; F25D9/00; H01L21/302; H01L21/3065; (IPC1-7): F25D9/00; F25D1/00
Attorney, Agent or Firm:
Yoshiki Hasegawa (5 others)