Title:
GAS DISSOLVING MODULE, GAS DISSOLVING DEVICE, WASHING DEVICE AND MANUFACTURE OF GAS DISSOLVING WATER
Document Type and Number:
Japanese Patent JP3857850
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas dissolving module capable of planning miniaturization of a device, reduction of gas utilizing amount, shortening of rising time or the like and of realizing a gas dissolving device having excellent efficiency.
SOLUTION: A gas dissolving module 2 has a hollow fiber 4 consisting of a gas permeation membrane internally circulating liquid and an outer jacket 5 which stores the hollow fiber 4 and dissolves gas into the liquid through the gas permeation membrane circulating the gas in a space between the hollow fiber 4 and the outer jacket. The gas dissolving device 1 stores the gas dissolving module 2 within a container 3 and is provided with a pure water introducing pipe 6, a gas introducing pipe 8, an ozone water discharging pipe 9 and a gas exhausting pipe 7 each of which communicates with each part of the gas dissolving module 2.
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Inventors:
Nobuaki Haga
Kenichi Mimori
Yasuhiko Kasama
Kenichi Mimori
Yasuhiko Kasama
Application Number:
JP2000004935A
Publication Date:
December 13, 2006
Filing Date:
January 13, 2000
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
International Classes:
B01D63/02; B08B3/08; H01L21/304; (IPC1-7): B01D63/02; H01L21/304; //B08B3/08
Domestic Patent References:
| JP7178322A | ||||
| JP61247465A |
Attorney, Agent or Firm:
Masatake Shiga