Title:
Gas electronic Zobaiki and a gas electronic Multiplication device
Document Type and Number:
Japanese Patent JP6029551
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas electron multiplier and a gas electron multiplication device, capable of improving resolution thereof.SOLUTION: A gas electron multiplier includes: an insulation layer made of aluminum anode oxide film and having a plurality of through holes penetrating through in a thickness direction thereof; and a pair of electrode layers holding the insulation layer and generating an electric field within the through holes. The through holes have a diameter of 20-400 nm, a pitch of 40-500 nm, and an opening area ratio of 30% or more.
Inventors:
Yoshinori Hotta
Application Number:
JP2013159978A
Publication Date:
November 24, 2016
Filing Date:
July 31, 2013
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
H01J43/10; H01J47/06
Domestic Patent References:
| JP2002117801A | ||||
| JP2012513020A |
Foreign References:
| WO2013000607A1 | ||||
| WO2010113682A1 | ||||
| WO2004032176A1 |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Hideaki Ito
Fumio Mitsuhashi
Haruko Sanwa
Hideaki Ito
Fumio Mitsuhashi
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