Title:
気体流量推定方法、孔径推定方法、気体流量推定装置及び孔径推定装置
Document Type and Number:
Japanese Patent JP7043023
Kind Code:
B2
Abstract:
In this gas flow rate estimation method, regardless of the flow state of a gas, the flow rate of the gas is determined from the molecular weight, viscosity coefficient, and specific heat ratio of the gas, the diameter and length of a hole, and the pressures upstream and downstream from the hole, based on a predetermined relational expression including, as parameters: the flow rate of the gas; the diameter and length of the hole; the upstream and downstream pressures; and the temperature, molecular weight, viscosity coefficient, and specific heat ratio of the gas. Additionally, in this invention, setting conditions for the type and temperature of the gas, the length of the hole, and the pressures upstream and downstream from the hole are set; the relational expression is used to obtain the correspondence relationship between the diameter of the hole and the flow rate of the gas flowing through the hole; an approximation function approximating the obtained correspondence relationship is determined; the flow rate of a gas passing through a test piece having a hole of an unknown diameter is measured; and the diameter of the hole is estimated, based on the basis of the measured flow rate and the approximation function.
Inventors:
Yoshida Hajime
Yoshinori Takei
Kenta Arai
Mao Hirata
Tsutomu Hara
Inomata order
Yoshinori Takei
Kenta Arai
Mao Hirata
Tsutomu Hara
Inomata order
Application Number:
JP2021508009A
Publication Date:
March 29, 2022
Filing Date:
October 16, 2020
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Fukuda Co., Ltd.
Fukuda Co., Ltd.
International Classes:
G01F1/34; G01B13/10; G01F1/00; G01M3/00
Domestic Patent References:
| JP2004020524A |
Attorney, Agent or Firm:
Masataka Niwa
Yoshiaki Nishiyama
Akihiko Umeda
Yoshiaki Nishiyama
Akihiko Umeda