Title:
GAS FLOW SYSTEM OF FEEDER PATH
Document Type and Number:
Japanese Patent JP3193074
Kind Code:
B2
Abstract:
PURPOSE: To provide a gas flow system of a feeder path capable of always holding an even dry state of all the wave guide paths of a feeder path.
CONSTITUTION: This system is a gas flow system of a feeder path provided with a microwave oscillation part 1, a wave guide tube microwave circuit part 3 forming a gas flow path from the microwave oscillation part 1 to an antenna 2, a gas supply part 4 supplying dry gas and an exhaust gas part 5 exhausting gas continuously or intermittently and constituted that a gas supply is performed from one end of the wave guide tube microwave circuit part 3 and an exhaust is performed from the other end. Further, the system is the gas flow system of the feeder path circulating dry gas by forming a gas flow route from the antenna 2 to a local oscillation part 6. Further, the system is the gas flow system of the feeder path constituted that the exhaust of the exhaust part 5 is returned to the gas supply part 4. Further, the system is a gas flow system of the feeder path constituted that specific gas is supplied to the gas supply part 4 from a bomb.
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Inventors:
Toshihiko Yamagata
Yasushi Chayama
Yasushi Chayama
Application Number:
JP17941191A
Publication Date:
July 30, 2001
Filing Date:
July 19, 1991
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01P1/30; (IPC1-7): H01P1/30
Domestic Patent References:
| JP63254801A | ||||
| JP5956846U | ||||
| JP244405U | ||||
| JP59108305U |
Attorney, Agent or Firm:
▲高▼須 宏