Title:
GAS FRICTION PUMP
Document Type and Number:
Japanese Patent JP2005214192
Kind Code:
A
Abstract:
To provide a lubricant-less bearing support gas friction pump characterized by a simple structure enabling the pump to be manufactured at low cost.
This gas friction pump comprises a fixed pump action structure portion 14 having a rotor shaft with a bearing 5 at the high vacuum side end part and a bearing device at the rear pressure side end part and a rotating pump action structure portion 15 fixed onto a rotatable rotor shaft 4. The high vacuum side bearing is a normal bearing and the rear pressure side bearing device comprises at least one gas bearing. In an advantageous design, the gas bearing may be designed as a module and fixedly fitted to a cylindrical housing portion.
Inventors:
CONRAD ARMIN
JOERG STANZELL
JOERG STANZELL
Application Number:
JP2004086559A
Publication Date:
August 11, 2005
Filing Date:
March 24, 2004
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04D29/056; F04D19/04; F04D23/00; F04D29/04; F04D29/048; F04D29/057; F04D29/10; F16C32/04; F16C32/06; F16C33/80; (IPC1-7): F04D19/04; F04D23/00; F04D29/04; F04D29/10; F16C32/04; F16C32/06; F16C33/80
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
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