Title:
GAS LASER DISCHARE PART
Document Type and Number:
Japanese Patent JPH06252480
Kind Code:
A
Abstract:
PURPOSE: To attain cost reduction and reduce the size of a gas laser device by upgrading the fixing structure of a main electrode and a dielectric for a gas vessel and provide a high reliability-available gas laser discharging part by preventing the generation of creeping discharge and stabilizing the formation of glow discharge.
CONSTITUTION: A pair of main electrode 1 and 2 are laid out as opposed in a gas vessel 24 and fixed mechanically, forming a gas flow passage which includes a fan 21 and a heat exchanger 22. The main electrodes 1 and 2 are electrically connected to and fixed with dielectrics 10a and 10b. Furthermore, an insulator 17 covers the connection parts of the main electrodes 1 and 2 and the dielectrics 10a and 10b.
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Inventors:
YASUOKA KOICHI
OKITA YUJI
OKITA YUJI
Application Number:
JP3512693A
Publication Date:
September 09, 1994
Filing Date:
February 24, 1993
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA F A SYSTEM ENG
TOSHIBA F A SYSTEM ENG
International Classes:
H01S3/097; (IPC1-7): H01S3/097
Attorney, Agent or Firm:
Mitsuharu Kiuchi
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