To provide a gas measuring apparatus that has a simple structure, can be operated easily, and can accurately measure an internal capacity.
The gas measuring device has a minute flow generator 5 arranged via an on/off valve communicating with the inside of an object to be tested. A fine tube 50, where the sectional shape is nearly constant in the longitudinal direction, is provided inside the generator 5, and a prescribed adjustment pressure is applied to the primary side of the fine tube 50, thus dispensing with the adjustment of a restriction section for squashing one portion of the fine tube, dispensing with an O-ring for generating an error in the amount of change in capacity by the backlash or deformation of a capacity varying means, thus accurately obtaining a desired flow rate from the secondary side, reducing the measurement error of the internal capacity, and accurately self-diagnosing the gas measuring apparatus. Additionally, since the minute flow generator 5 is formed in a simple structure while owning the fine tube 50 without any movable sections, the generator 5 can be manufactured easily and inexpensively.
TSUCHIYA SHINICHI
IKEDA NOBORU
Kanji Nakayama
Tsuyoshi Ishizaki
Next Patent: SPEED DETECTION DEVICE AND SPEED DETECTION METHOD