To perform the sampling of a definite amount of gas, regardless of the kind of gas, and to perform accurate analysis of a gas composition and the measurement of the flow rate of the gas.
The sampling gases (a), (b) and (c) from inlet ports 2, 3 and 4 and the standard gas from an inlet port 5 are supplied to an inlet gas switching device 1 so as to be changed over mutually and the gas from an outlet 6 is sucked by a pump 13 to be introduced into a sonic nozzle 11. A dilution gas and a tracer gas are introduced into the upstream part of the sonic nozzle, and the pressure difference between both gases is measured by pressure gauges G1 and G2, while changes in the sampling amount due to the pressure at a sampling point is corrected on the basis of measured pressure. The gas discharged from the pump 13 is guided to the QMS or composition analyzing/metering device 17, such as FTIR or the like, provided outside of a thermostatic tank 16 that is a gas sampling unit via a needle valve 15 to perform the analysis of a composition and the measurement of the flow rate. The standard gas for use in calibration can be supplied between the needle valve 15 and the composition analyzing/metering device 17.
COPYRIGHT: (C)2006,JPO&NCIPI
Ken Katoh
Amano Masatsugu
Ken Nozaki
Akira Negishi
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