Title:
GAS SENSITIVE ELEMENT
Document Type and Number:
Japanese Patent JPS5529715
Kind Code:
A
Abstract:
PURPOSE: To improve sensitivity and the selection efficiency of gas and reduce the change with the passage of time by providing a catalyst layer using amorphous alumina including Pt or a Pt compound as a catalyst on the oxide semiconductor surface where ZnO is main components.
CONSTITUTION: A pair of electrodes 2 are provided on the surface of cylindrical insulating substance 1, and gas sensitive substance 3 consisting of a ZnO-system oxide semiconductor is so provided that cylindrical insulating substance 1 and electrodes 2 may be covered with substance 3. Further, catalyst layer 4 is provided on the surface of gas sensitive substance 3. Amorphous alumina is used as catalyst layer 4, so that a sufficient safety can be obtained.
Inventors:
SHIRATORI MASAYUKI
KATSURA MASAKI
KANEDA TADAO
KATSURA MASAKI
KANEDA TADAO
Application Number:
JP10175978A
Publication Date:
March 03, 1980
Filing Date:
August 23, 1978
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01N27/12; (IPC1-7): G01N27/12