Title:
バッフルを有するガス供給部材
Document Type and Number:
Japanese Patent JP6938761
Kind Code:
B2
Abstract:
A gas supply member includes a first side opposite a second side and an inner surface defining a first opening extending between the first and second sides. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension that has a face partially defining the second side, and the first extension includes a first plurality of holes extending through the first extension to the face. The gas supply member includes a fourth side opposite the third side, the fourth side includes a protrusion that has a face partially defining the second side. The gas supply member also includes a baffle disposed adjacent to the inner surface, the baffle includes a first portion extending from the inner surface and a second portion attached to the first portion, and the second portion orthogonal to the first portion and parallel to the third side.
Inventors:
Shah, Cartique
Sunday, Biswas Kumar
Pradan, Kailash
Tarabarjura, Shiraju
George, Rene
Shono, Eric Kihara
Bottini, Philip A.
Curtis, roger
Sunday, Biswas Kumar
Pradan, Kailash
Tarabarjura, Shiraju
George, Rene
Shono, Eric Kihara
Bottini, Philip A.
Curtis, roger
Application Number:
JP2020504012A
Publication Date:
September 22, 2021
Filing Date:
July 30, 2018
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/31; F27D7/02; H01L21/205
Domestic Patent References:
| JP2010272889A | ||||
| JP3107055U | ||||
| JP2001509647A | ||||
| JP2014074190A | ||||
| JP2006100792A | ||||
| JP64052230U |
Foreign References:
| US20080168947 | ||||
| KR1020060117613A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation