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Title:
ガス供給ユニット
Document Type and Number:
Japanese Patent JP4092164
Kind Code:
B2
Abstract:
A gas supply unit includes fluid control devices and piping blocks so that the fluid control devices are mounted on the upper surfaces of the piping blocks and thus connected with each other, constituting a part of a gas supply line. A filter block including a filter element in a passage providing communication between the fluid control device and the piping block is connected between the fluid control device and the piping block.

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WO/2006/136597PIPELINE AND METHOD FOR MANUFACTURING THAT PIPELINE
Inventors:
Toshikazu Miwa
Application Number:
JP2002274704A
Publication Date:
May 28, 2008
Filing Date:
September 20, 2002
Export Citation:
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Assignee:
CKD Corporation
International Classes:
F16L39/00; F16L41/03; B01D46/24; F16K27/00; F16K51/00; F17D1/04
Domestic Patent References:
JP2002530614A
JP2001153289A
JP63163002A
Attorney, Agent or Firm:
Takashi Tomizawa
Ikuo Yamanaka
Akika Okado



 
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