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Patent Searching and Data


Title:
GATE DEVICE
Document Type and Number:
Japanese Patent JP2002333182
Kind Code:
A
Abstract:

To exhibit extremely high screen effect when screening an opening provided at the bulkhead partitioning front and rear regions.

The bulkhead 10 between a first chamber 11 and a second chamber 12 is provided with an opening 14 for passing a work 13, and in the upper position of this opening 14, a high-pressure fluid supply means 15, and in front and rear positions of this high pressure fluid supply means 15, high- speed fluid jetting means 16a and 16b are mounted, and in the under position of the opening 14, a fluid induction means 17 is provided. A high-pressure and low-speed fluid is supplied downward from the highpressure fluid supply means 15, and a high-speed fluid is jetted from both high-speed fluid jetting means 16a and 16b, and these high-speed fluids flow in the direction of parting from the bulkhead 10 besides being obliquely downward, being guided by guide walls 35a and 35b in the shape of curved surfaces, and a high-pressure fluid stay part Hp is made in the position of the opening 14, by the action of the high- speed fluid jetted from the nozzle 42 constituting the fluid induction means 17, and it breaks both chambers 11 and 12 atmospherically.


Inventors:
MORIGUCHI YASUYUKI
KINOSHITA KAZUTO
KIKUCHI YOSHIKI
Application Number:
JP2001141620A
Publication Date:
November 22, 2002
Filing Date:
May 11, 2001
Export Citation:
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Assignee:
HITACHI ELECTR ENG
International Classes:
B65G49/00; F24F9/00; H01L21/677; H01L21/68; (IPC1-7): F24F9/00; B65G49/00; H01L21/68
Domestic Patent References:
JPH06313603A1994-11-08
JPH0543543U1993-06-11
JPH11257700A1999-09-21
JPH063131A1994-01-11
JPH0359338A1991-03-14
JPH0874236A1996-03-19
Attorney, Agent or Firm:
Shunji Kagei