Title:
GATE VALVE USED UNDER VACUUM
Document Type and Number:
Japanese Patent JPS58121387
Kind Code:
A
Abstract:
PURPOSE:To obtain excellent sealing performance at all times by a method wherein an automatic controlling means for operating air pressure is provided so as not to apply excessive contact force by pressure during baking. CONSTITUTION:When a pressure instruction S is inputted, the opening of a pressure regulating valve is turned to be smaller so as to lower the operating air pressure. The operating air pressure is set at a value, in which a suitable contact force by pressure is obtained between a gate seal 13 and a seal ring 12 under the condition that an operating device 28 and the like are in the thermally enough elongated states with the rise of the temperature of their own. Accordingly, even during baking, no deterioration of sealing performance due to the yield of the knife edge of the gate seal 13 caused from excess contact force by pressure occurs, resulting in obtaining excellent sealing performance.
Inventors:
SONOBE TADASHI
Application Number:
JP135282A
Publication Date:
July 19, 1983
Filing Date:
January 09, 1982
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F16K51/02; F16K3/18; (IPC1-7): F16K51/02
Attorney, Agent or Firm:
Kenjiro Take