Title:
Gate valve
Document Type and Number:
Japanese Patent JP6172442
Kind Code:
B2
Inventors:
Tsuneo Ishigaki
Hiromi Shimoda
Koji Ogawa
Hiromi Shimoda
Koji Ogawa
Application Number:
JP2013095346A
Publication Date:
August 02, 2017
Filing Date:
April 30, 2013
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K3/18; F16K51/02; H01L21/3065
Domestic Patent References:
| JP2006005008A | ||||
| JP3173784A | ||||
| JP2006194303A | ||||
| JP2005030459A |
Attorney, Agent or Firm:
Hiroshi Hayashi
Hayashi Naoki
Hayashi Naoki
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