Title:
GETTER PUMP HAVING HIGH GAS ABSORPTION SPEED
Document Type and Number:
Japanese Patent JP2968795
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a getter pump having a high gas absorption speed.
SOLUTION: This getter pump 10 comprises a metallic housing 11, which defines an almost cylindrical chamber, and three to eight getter structures 13, 13'... placed parallel to one another and to the axis of the chamber. The getter structures comprise a plurality of respective discs 14, 14'... supported by respective center mounting members 15, 15',... and are arranged symmetrically around the center of the chamber to define a center cavity 17 enclosing a heater 16 needed to activate and operate a getter. The pump has a higher gas absorption speed than conventional pumps of similar sizes.
Inventors:
ANDOREA KONTE
Application Number:
JP28786698A
Publication Date:
November 02, 1999
Filing Date:
October 09, 1998
Export Citation:
Assignee:
SAESU GETERUSU SPA
International Classes:
F04B37/04; F04B37/02; H01J7/18; (IPC1-7): F04B37/02
Domestic Patent References:
| JP925875A | ||||
| JP8315961A |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)