物理的蒸着プロセスにおける作業雰囲気を高純度化するためのゲッタシステム

Title:

物理的蒸着プロセスにおける作業雰囲気を高純度化するためのゲッタシステム

Document Type and Number:

Japanese Patent JP4331294

Kind Code:

B2

Abstract:

A system is disclosed formed of one or more getter devices in form of sintered bodies of getter powders or deposits of getter material onto a metal support, to be arranged in the work area of process chambers for the deposition of thin layers of metallic or ceramic materials from vapors or plasmas for purifying the gaseous atmosphere contained in that area.

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Inventors:

Andrea Conte
Francesco Mazza

Application Number:

JP36435398A

Publication Date:

September 16, 2009

Filing Date:

December 22, 1998

Export Citation:

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Assignee:

Saes Getters Sochieta Per Azioni

International Classes:

F04B37/02; G11B7/26; C22C16/00; C23C14/00; C23C14/56; H01J7/18

Domestic Patent References:

JP9180655A
JP39013152B1

Attorney, Agent or Firm:

Takashi Ishida
Jun Tsuruta
Tetsuji Koga
Masaya Nishiyama
Higuchi Souji

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