To support a proper position of a glass substrate by a claw without exchanging the claw in cases where size in the cross direction of the glass substrate is different by providing a mechanism to slide in the cross direction of the glass substrate on the claw.

A glass substrate 5 is supported by a claw 1, carries out opening and closing motion and vertical motion of the claw 1 and is arranged on a heating and cooling plate 4. Thereafter, the glass substrate 5 is sequentially carried by reciprocal motion of the claw 1. Hereby, the claw 1 is devised to slide in the cross direction of the glass substrate 5 by loosening a screw 2 fixing the claw 1 by machining a slot on a fixed part of the claw 1. Additionally, it is devised to stop sliding the claw 1 by specifying a position of the screw 2 for fixing the claw 1. Thereafter, the claw 1 is fixed by the fixing screw 2 by providing a groove in a direction orthogonal with a part forming the slot of the claw 1 so as to precisely position it at a position to support size of the glass substrate 5 to correspond in cases where regulation of more than three kinds is required in the cross direction of the glass substrate 5.