To rapidly, uniformly remove a solvent gas by obliquely installing a furnace body at its one end adjustably high and at the other end low, forming a flowing space of the gas between glass plate heaters, and opening a glass flow outlet at a high position of the body.

A planar heater 2 is provided in a tensioned state on an inner surface of a furnace body 1 formed of a heat insulator, and beams 3, 4 and designating beams 5 are mounted in the body. A base substrate 6 is placed on the beams 5, and a narrow solvent gas flowing space 7 is formed between the heater 2 and a glass substrate 6. An atmosphere flow inlet 9 having a dust filter 8 is provided at one end of the body 1, and a solvent gas flow outlet 10 is provided at the other surface. The outlet 10 of the body 1 is provided with height-adjustable oblique legs 11 to stabilize the body 1 in an oblique structure, and its inclining angle is changed by vertically moving the legs 11. Thus, the gas can be rapidly, uniformly removed, thereby obtaining good drying characteristics.