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Title:
GLASS SUBSTRATE HOLDING DEVICE
Document Type and Number:
Japanese Patent JP2015117130
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a glass substrate holding device for holding a glass substrate which has a rectangular plate shape and on which deposition is applied on one planar surface, in a posture at which the glass substrate is inclined to a side of the one planar surface, that is capable of holding the glass substrate while maintaining high-grade flatness without causing deflection or the like due to an own weight.SOLUTION: Provided is a glass substrate holding device 1 for holding a glass substrate W which has a rectangular plate shape and on which deposition is applied to a rear surface (one planar surface), in a posture at which the glass substrate W is inclined to a rear surface (the one planar surface) side. The glass substrate holding device 1 comprises a holding unit 10 which holds the glass substrate while abutting on at least one portion of top and bottom ends and right and left ends on the rear surface (the one planar surface) of the glass substrate W.

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Inventors:
KITAMURA KEIICHI
SAITO TAKAYOSHI
Application Number:
JP2014055684A
Publication Date:
June 25, 2015
Filing Date:
March 18, 2014
Export Citation:
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Assignee:
NIPPON ELECTRIC GLASS CO
International Classes:
B65G49/06; C23C14/50; G02F1/13; H01L21/683
Attorney, Agent or Firm:
Juichiro Yano
Yasuo Iwamoto



 
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