ガラス基板の製造方法 - Nippon Electric Glass Co., Ltd.

Title:

ガラス基板の製造方法

Document Type and Number:

Japanese Patent JP6674151

Kind Code:

B2

Abstract:

In a method for manufacturing a glass substrate, the method comprising performing an etching process through use of a processing gas 5 in a processing region 4 provided above a conveyance path of a glass substrate 3 in a chamber 2 while the glass substrate 3 is conveyed in a horizontal direction, the glass substrate 3 being carried into the chamber 2 from a loading port 2a, and then carrying the processed glass substrate 3 out of the chamber 2 from a delivery port 2b, an opening width along a vertical direction in each of the loading port 2a and the delivery port 2b is adjusted on the basis of an atmospheric pressure difference between inside and outside the chamber 2 by moving opening width adjustment members 8, 9 on a top edge 2aa (2ba) side and a bottom edge 2ab (2bb) side, respectively, of openings of the loading port 2a and the delivery port 2b.

Inventors:

Yuyuki Takahashi
Kazuhiro Ohno
Hiroki Nakatsuka
Oku Hayato

Application Number:

JP2017538553A

Publication Date:

April 01, 2020

Filing Date:

September 09, 2016

Export Citation:

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