Title:
マスクブランク用のガラス基板、マスクブランクおよびフォトマスク
Document Type and Number:
Japanese Patent JP6862859
Kind Code:
B2
Abstract:
A glass substrate for a mask blank includes a first surface and a second surface. The first surface and second surface face each other. Each of the first surface and the second surface is approximately square having a vertical length and a horizontal length being equal to the vertical length. The first surface of the glass substrate has specific profile properties.
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Inventors:
Okamura Yuzo
Application Number:
JP2017014710A
Publication Date:
April 21, 2021
Filing Date:
January 30, 2017
Export Citation:
Assignee:
AGC Inc.
International Classes:
G03F1/60; G03F1/24
Domestic Patent References:
| JP2016038573A | ||||
| JP2010039352A | ||||
| JP2012218981A | ||||
| JP2013082612A |
Foreign References:
| WO2016098452A1 | ||||
| WO2013084978A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito