To provide a glassy carbon-coated carbon material having excellent chemical stability such as excellent oxidation resistance and excellent plasma resistance.
This glassy carbon-coated carbon material obtained by forming a glassy carbon coating film containing Si atoms and O atoms homogeneously dispersed therein on the surface of a carbonaceous substrate. The glassy carbon coating film has a tissue property by whole X-ray diffraction analysis metal Si and a Si compound can not be observed and by whose transmission electron microscope observation a granular tissue can not be recognized. When having a Si atom content (x) of 0.5-15 wt.% and an O atom content (y) expressed by the formula: (x)+2≥(y)≥(x)-2, the glassy carbon coating film imparts improved oxidation resistance and improved plasma resistance.
TOKUNAGA TAKESHI
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