Title:
ARTICLE STORAGE FACILITY IN SEMICONDUCTOR MANUFACTURING PLANT, AND LOGISTICS SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANT INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2023093359
Kind Code:
A
Abstract:
To provide an article storage facility in a semiconductor manufacturing plant that can supplies power with a simpler configuration, and a logistics system for a semiconductor manufacturing plant including the same.SOLUTION: An article storage facility in a semiconductor manufacturing plant according to an embodiment of the present invention includes: a storage unit installed around a rail that provides a travel route of a transport vehicle and stores a transport container containing a wafer; a purge unit that supplies an inert gas into the transport container; a control unit that identifies the transport container stored in the storage unit and controls the purge unit to supply the inert gas to the transport container; and a power supply unit that supplies a current induced from a power supply cable installed along the rail to the control unit.SELECTED DRAWING: Figure 2
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Inventors:
LEE SUNG HO
Application Number:
JP2022198506A
Publication Date:
July 04, 2023
Filing Date:
December 13, 2022
Export Citation:
Assignee:
SEMES CO LTD
International Classes:
H01L21/677; B65G1/04
Attorney, Agent or Firm:
Patent Attorney Corporation Taiyo International Patent Office
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