Title:
粒状シリコン製造方法およびその装置
Document Type and Number:
Japanese Patent JP5168657
Kind Code:
B2
Inventors:
Takashi Ochiai
Wataru Sugimura
Wataru Sugimura
Application Number:
JP2008273563A
Publication Date:
March 21, 2013
Filing Date:
October 23, 2008
Export Citation:
Assignee:
Sumco inc.
International Classes:
C01B33/02
Domestic Patent References:
| JP2003247783A | ||||
| JP2006206368A | ||||
| JP2004244276A | ||||
| JP200516855A | ||||
| JP200148697A |
Foreign References:
| WO2008047881A1 |
Attorney, Agent or Firm:
Ichiro Abe