Title:
GRAPHENE FILM, ELECTRON PERMEABLE ELECTRODE AND ELECTRON EMISSION ELEMENT
Document Type and Number:
Japanese Patent JP2017045639
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a metal-insulator-metal (MIM) type electron emission element with high electron emission efficiency.SOLUTION: An electron emission element 20 comprises a lower electrode layer 21, an insulator layer 22, and an electron permeable electrode 23. The electron permeable electrode 23 allows electrons to permeate in a direction intersecting the inner direction of a crystal face so that no impurities may be detected in the center portion in the thickness direction. The electron permeable electrode 23 is made of a graphene film with a film thickness of 0.35 to 0.40 nm. The insulator layer 22 is formed to have a film thickness of 5 to 20 nm.SELECTED DRAWING: Figure 4
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Inventors:
MURAKAMI KATSUHISA
FUJITA JUNICHI
FUJITA JUNICHI
Application Number:
JP2015167777A
Publication Date:
March 02, 2017
Filing Date:
August 27, 2015
Export Citation:
Assignee:
UNIV TSUKUBA
International Classes:
H01J1/312
Domestic Patent References:
| JP2010037128A | 2010-02-18 | |||
| JP2013112604A | 2013-06-10 | |||
| JP2005512280A | 2005-04-28 | |||
| JP2015138775A | 2015-07-30 | |||
| JP2015024937A | 2015-02-05 | |||
| JP2013177273A | 2013-09-09 |
Foreign References:
| KR20100123143A | 2010-11-24 | |||
| US20150243468A1 | 2015-08-27 |
Attorney, Agent or Firm:
Sumio Tanai
Masato Iida
Masato Iida
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