Title:
GRAPHITE HEATER FOR MANUFACTURING SINGLE CRYSTAL AND APPARATUS FOR PULLING SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JP2019123645
Kind Code:
A
Abstract:
To provide a graphite heater for manufacturing a single crystal, capable of uniformizing temperature distribution in the circumferential direction of the heater compared with a conventional heater and reducing the occurrence frequency of dislocation.SOLUTION: The graphite heater including a cylindrical heating element and an energization terminal part connected to the heating element is used when a single crystal is manufactured by the Czochralski method. The heating element has a plurality of upper slits extended downward from the upper end and lower slits extended upward from the lower end alternately provided; height regions between the ends of the upper and lower slits are divided into a plurality of heating slit parts by the upper slits and the lower slits; and the maximum sectional area in a region connecting the heating element between the terminal part and the heating slit part to be connected is 1.1 times or more and 6.0 times or less of the cross-sectional area of the heating slit part.SELECTED DRAWING: Figure 1
Inventors:
IWASAKI ATSUSHI
TAKEYASU YUKINOBU
TAKEYASU YUKINOBU
Application Number:
JP2018005765A
Publication Date:
July 25, 2019
Filing Date:
January 17, 2018
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
International Classes:
C30B15/00; C30B29/06; F27B14/14; H05B3/14; H05B3/40
Domestic Patent References:
| JPH11139895A | 1999-05-25 | |||
| JP2014062004A | 2014-04-10 |
Foreign References:
| KR20140129733A | 2014-11-07 | |||
| CN104762655A | 2015-07-08 |
Attorney, Agent or Firm:
Mikio Yoshimiya
Toshihiro Kobayashi
Toshihiro Kobayashi