Title:
石英製の格子構造体および回折格子の製造方法
Document Type and Number:
Japanese Patent JP7266275
Kind Code:
B2
Abstract:
To provide a quartz grating structure, in particular a quartz grating structure with a large aspect ratio.SOLUTION: A method of manufacturing a quartz grating structure is provided, comprising: preparing a silicon-on-quartz (SOQ) substrate; drawing a resist pattern on a silicon-side surface of the SOQ substrate; forming grooves on the silicon-side surface by etching using the resist pattern as a mask; and oxidizing entire silicon of the SOQ substrate.SELECTED DRAWING: Figure 3
Inventors:
Ebisuka Noboru
Takayuki Okamoto
Yutaka Yamagata
Ichi Tanaka
Takashi Hattori
Takayuki Okamoto
Yutaka Yamagata
Ichi Tanaka
Takashi Hattori
Application Number:
JP2018189248A
Publication Date:
April 28, 2023
Filing Date:
October 04, 2018
Export Citation:
Assignee:
RIKEN
International Classes:
G02B5/18
Domestic Patent References:
| JP2005334874A | ||||
| JP2018106048A | ||||
| JP2004138895A | ||||
| JP2017223726A | ||||
| JP2017211670A | ||||
| JP2017138597A |
Other References:
N.Ebizuka et.al,Novel gratings for next-generation instruments of astronomical obserbations,SPIE Optics+Optoelectronics,SPIE,2018年07月22日,10233,1-8
Attorney, Agent or Firm:
Patent Attorney Corporation Shuwa Patent Office