Title:
GRINDING APPARATUS
Document Type and Number:
Japanese Patent JP2022080967
Kind Code:
A
Abstract:
To provide a grinding apparatus which adjusts an external diameter of a grinding region without exchanging a grinding wheel.SOLUTION: A grinding apparatus comprises: a chuck table with a holding surface on which a work piece is held; a spindle arranged above the chuck table; a mounting part which is arranged above the chuck table and fixed to a tip part of the spindle; and a grinding unit in which a grinding wheel unit having a plurality of grinding grindstones arranged on the underside of the mounting part is given. The mounting part includes: a disk-like base plate; and a plurality of split mounting parts which are respectively arranged at radially divided regions of the underside surface of the base plate from the center of the underside surface of the base plate and movable in a radial direction of the base plate.SELECTED DRAWING: Figure 5
Inventors:
KIMURA TAIICHIRO
Application Number:
JP2020192204A
Publication Date:
May 31, 2022
Filing Date:
November 19, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/04; B24B45/00; H01L21/304
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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