Title:
研削装置、及び研削方法
Document Type and Number:
Japanese Patent JP7467653
Kind Code:
B2
Abstract:
This grinding apparatus comprises a plurality of chucks, a tool driving unit, a table, and a table cover. The chuck holds a substrate. The tool driving unit drives a grinding tool being abutted on the substrate. The table holds the plurality of chucks around the rotation axis thereof and rotates around the rotation axis. The table cover rotates together with the table. The table cover has a slope section that slopes downward in proportion to the distance from the rotation axis. The grinding apparatus comprises a nozzle. The nozzle positioned between the top point of the slope section and the chucks supplies a washing liquid to the slope section.
Inventors:
Munehisa Kodama
Application Number:
JP2022551895A
Publication Date:
April 15, 2024
Filing Date:
September 13, 2021
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B24B55/06; B24B7/00; B24B7/04; B24B49/04; H01L21/304
Domestic Patent References:
| JP2013188813A | ||||
| JP2019192846A | ||||
| JP201885401A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito