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Patent Searching and Data


Title:
GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2000108004
Kind Code:
A
Abstract:

To stably rotate a grinding head without movement by locating a center of gravity of a band-shaped grinding film supplying means and a center of gravity of a band-shaped grinding film collecting means on a rotation axis of the grinding head.

A grinding film supplying means 9 is capable of feeding a grinding film 8 along an elastic pad 7 which is detachably provided on a grinding surface of a grinding head 4. A grinding film collecting means 10 is capable of winding and collecting the grinding film 8 that the grinding film supplying means 9 supplies to the grinding surface of the grinding head 4. Each center of gravity of both of the grinding film supplying means 9 and the collecting means 10 is arranged so as to be located on a rotation axis 20 of the grinding head 4. As a result, the grinding head 4 is capable of stably rotating without moving, even if the grinding head 4 rotates. Even if each gravity of the grinding film supplying means 9 to the collecting means 10 holding the grinding pad 8 is not the same, the grinding head 4 does not move.


Inventors:
MIYAZAKI KYOICHI
TAKAHASHI KAZUO
Application Number:
JP28533498A
Publication Date:
April 18, 2000
Filing Date:
October 07, 1998
Export Citation:
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Assignee:
CANON KK
International Classes:
B24B21/00; B24B37/00; H01L21/304; (IPC1-7): B24B21/00; B24B37/00; H01L21/304
Attorney, Agent or Firm:
Marushima Giichi