Title:
研削装置
Document Type and Number:
Japanese Patent JP6403523
Kind Code:
B2
Inventors:
Shinya Watanabe
Application Number:
JP2014198028A
Publication Date:
October 10, 2018
Filing Date:
September 29, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B7/22; B24D7/16; H01L21/304
Domestic Patent References:
| JP2009196016A | ||||
| JP1193164A | ||||
| JP2003181767A |
Foreign References:
| EP2915630A1 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto