Title:
研削装置
Document Type and Number:
Japanese Patent JP6403596
Kind Code:
B2
Inventors:
Masaki Kato
Suzuki Shiori
Mitsuhiro Nomura
Takayuki Kabasawa
Masahiro Isozaki
Nobutaka Sato
Suzuki Shiori
Mitsuhiro Nomura
Takayuki Kabasawa
Masahiro Isozaki
Nobutaka Sato
Application Number:
JP2015022856A
Publication Date:
October 10, 2018
Filing Date:
February 09, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; H01L21/304
Domestic Patent References:
| JP51145073A | ||||
| JP2010149200A | ||||
| JP200655963A |
Foreign References:
| CN205520821U | ||||
| US4551902 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto