Title:
GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2023060481
Kind Code:
A
Abstract:
To provide a grinding device that can prevent a large difference from occurring between a thickness of a central part and a thickness of an outer edge part of a work-piece after grinding.SOLUTION: A grinding device, which grinds a plate-like work-piece, comprises: a chuck table that has a holding surface for holding the work-piece and an attachment surface positioned at the opposite side to the holding surface, in which a plurality of holes penetrating through in a thickness direction crossing with respect to the holding surface are formed at an outer edge part; a table base that has a surface to be attached that is brought into contact with the attachment surface of the chuck table, and provided with a plurality of screw holes being open therein at positions corresponding to the plurality of holes of the chuck table; bolts that are fastened to the screw holes through the holes to fix the chuck table to the table base; and a heat insulating cap that covers portions exposed from the chuck table, of the bolts, with the chuck table fixed to the table base, so as to suppress heat transfer from grinding water to the bolts.SELECTED DRAWING: Figure 2
Inventors:
KANEKO TETSUYA
NAGAI OSAMU
NAGAI OSAMU
Application Number:
JP2021170115A
Publication Date:
April 28, 2023
Filing Date:
October 18, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; B23Q11/14; B24B7/04; B24B55/02; H01L21/304
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato