Title:
GRINDING METHOD AND GRINDER USING THE SAME
Document Type and Number:
Japanese Patent JP3450651
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To increase a detection system of a grinding end point, by a method wherein an absolute value of a film thickness at a specified position is measured, a film thickness distribution of a film layer is acquired using an obtained measurement value, and it is controlled whether or not grinding is to be continued by the obtained data.
SOLUTION: An absolute value of a film thickness at a position A of an insulating film layer 5a is measured by a first film thickness measuring means 2a. Then, film thickness information of the insulating film layer 5a of a to-be- processed object 6 is measured by utilizing instantaneous lights even while it is being ground. A film thickness of the insulating film layer 5a is acquired by controlling means 3 based on an output signal obtained from the film thickness measuring means 2a. At this time, the controlling means 3 decides whether or not the film thickness at a specified position of the insulating film layer 5a is within a preset range. When the film thickness is within a presets range, a grinding step is stopped. Otherwise, it is controlled to again continue the grinding step.
Inventors:
Masaru Chii
Minoh
Minoh
Application Number:
JP16955797A
Publication Date:
September 29, 2003
Filing Date:
June 10, 1997
Export Citation:
Assignee:
Canon Inc
International Classes:
B24B37/013; B24B37/07; B24B49/04; B24B49/12; H01L21/304; (IPC1-7): H01L21/304; B24B37/04
Domestic Patent References:
| JP1034522A | ||||
| JP6252113A | ||||
| JP936072A | ||||
| JP10335288A |
Attorney, Agent or Firm:
Yukio Takanashi
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