GRINDING METHOD FOR WORKPIECE

Japanese Patent JP2023036121

A

To provide a grinding method for a workpiece capable of suppressing to a minimum reduction of productivity with setting of a grinding stone.SOLUTION: The present invention relates to a grinding method for a workpiece including: a grinding step of grinding a front face side of the workpiece, of which the modified layer is exposed on a front face, by selectively using an annular first grinding wheel comprising a first grinding stone in which abrasive grains are dispersed and an annular second grinding wheel comprising a second grinding stone in which abrasive grains having an average grain size smaller than that of the abrasive grains of the first grinding stone are dispersed; and a determination step of determining whether or not setting for aligning the second grinding stone into a state suitable for grinding is required before the grinding step. In the grinding step, in a case where it is determined in the determination step that the setting is required, the front face side of the workpiece is ground using the second grinding wheel without grinding the front face side of the workpiece using the first grinding wheel, thereby grinding the front face side of the workpiece while performing the setting of the second grinding stone in accordance with front face ruggedness caused by the modified layer.SELECTED DRAWING: Figure 4

SUDO YUJIRO

JP2021142950A

March 14, 2023

September 02, 2021

Click for automatic bibliography generation  

DISCO ABRASIVE SYSTEMS LTD

H01L21/304; B24B7/00; B24B49/16; B24B53/00

Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato

Previous Patent: Grinding equipment

Next Patent: Additive mixing device and foamed resin molding manufacturing device