被加工物の研削方法

Japanese Patent JP7405649

B2

A method of grinding a surface of a workpiece that has surface irregularities includes a first grinding step of grinding the surface of the workpiece by a predetermined amount of stock removal while keeping a measuring element of a height gauge out of contact with the surface of the workpiece, thereafter, a height difference measuring step of bringing the measuring element of the height gauge into contact with the surface of the workpiece and measuring a height difference of surface irregularities on the surface of the workpiece with the height gauge, and a second grinding step of, if the measured height difference is larger than a preset range, grinding the surface of the workpiece while keeping the measuring element of the height gauge in contact with the surface of the workpiece until the measured height difference falls within the preset range.

WO/1995/003912	Z-AXIS DRIVE FOR 2-AXIS MACHINE TOOL
JPS5935746	[Title of the Invention] A method of controlling a processing cycle of a machine tool, and its device
WO/2005/119383	METHOD AND APPARATUS FOR CONTROLLING THE MACHINING OF MECHANICAL PIECES

Masaaki Nagashima
Naoto Takada

JP2020036701A

December 26, 2023

March 04, 2020

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Disco Co., Ltd.

B24B49/04; B23K26/53; B24B1/00; B24B7/04; B24B49/03; B24B49/10; H01L21/304

JP2016025260A
JP2019125687A
JP2017092314A
JP2018186153A

Patent Attorney Corporation Tokyo Alpa Patent Office

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