Title:
被加工物の研削方法
Document Type and Number:
Japanese Patent JP7068096
Kind Code:
B2
Abstract:
To perform grinding up to desired finish thickness in a range exceeding a measurement range of non-contact type thickness measurement means.SOLUTION: Grinding thickness in a range which can be measured by non-contact type thickness measurement means 12 or more is predetermined and grinding is performed up to the thickness (first grinding step). Then, thickness T3 of a protective member is calculated by subtracting thickness T2 of a workpiece measured by the non-contact type thickness measurement means 12 from total thickness T1 measured by contact type thickness measurement means 13 (protective member thickness calculating step). The workpiece 110 is ground up to desired finish thickness while measuring the total thickness T1 by the contact type thickness measurement means 13 and measuring the thickness T2 of the workpiece obtained by subtracting the thickness T3 of the protective member from the total thickness T1 (second grinding step).SELECTED DRAWING: Figure 3
Inventors:
Shinji Yamashita
Application Number:
JP2018152657A
Publication Date:
May 16, 2022
Filing Date:
August 14, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B7/04; B24B49/04; B24B49/10; B24B49/12; H01L21/304
Domestic Patent References:
| JP2007220775A | ||||
| JP2016132047A | ||||
| JP2007335458A | ||||
| JP2017140656A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office