Title:
GRINDING AND POLISHING MACHINE WITH WORK SPINDLE AND TOOL SPINDLE
Document Type and Number:
Japanese Patent JP2003251557
Kind Code:
A
Abstract:
To provide a grinding and polishing device capable of easily and certainly carrying out change-over of grinding and polishing to each other without requiring complicated adjustment.
This grinding and polishing device is furnished with a cam drive mechanism 170 to advance and retreat each of tool spindles against a work spindle by moving each of sub-assemblies.
Inventors:
STOCKER MARK ANDREW
FALKNER DERMOT ROBERT
MORANTZ PAUL MARTIN
PIERSE MICHAEL GEORGE
FALKNER DERMOT ROBERT
MORANTZ PAUL MARTIN
PIERSE MICHAEL GEORGE
Application Number:
JP2002358116A
Publication Date:
September 09, 2003
Filing Date:
June 11, 1997
Export Citation:
Assignee:
UNOVA UK LTD
International Classes:
B24B41/06; B23Q1/36; B23Q3/18; B23Q17/24; B24B1/00; B24B5/04; B24B5/06; B24B9/00; B24B9/06; B24B17/04; B24B17/06; B24B19/02; B24B41/00; B24B41/02; B24B41/04; B24B47/12; B24B49/00; B24B49/02; B24B49/12; B24B53/00; B24B53/07; B24B55/02; H01L21/304; H01L21/306; H01L21/66; H01L21/00; (IPC1-7): B24B47/12; B24B9/00; B24B19/02; B24B53/07; H01L21/304
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)