Title:
GRINDING UNIT AND GRINDING PROCESSING EQUIPMENT
Document Type and Number:
Japanese Patent JP2016020017
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide grinding processing equipment and component devices thereof which can more simply and highly accurately adjust an angle of a rotary shaft of a grinding surface in relation to a ground surface of a substrate.SOLUTION: A grinding head section includes a grinding stone 20 and an inclination adjustment mechanism for inclining a rotary shaft of the grinding stone 20 so as to change a relative angle of a grinding stone grinding surface in relation to a ground surface of a substrate W. The inclination adjustment mechanism includes: an adjuster 24 arranged at one intersection point position of two intersection points in which a horizontal line passing a center of the grinding stone grinding surface and a grinding stone grinding surface peripheral edge intersect each other; and adjusters 22 and 23 which are arranged at the grinding stone grinding surface peripheral edge and are arranged at positions forming each equal spaced angle with the center of the grinding stone grinding surface by using the arrangement position of the adjuster 24 as a reference. The inclination adjustment mechanism determines change amount for changing the relative angle of the grinding stone grinding surface in relation to the ground surface on the basis of the shape of the ground surface processed most recently, and operates only the adjuster 24 of the adjusters 22, 23 and 24 according to the change amount.SELECTED DRAWING: Figure 4
Inventors:
KOMURA AKIO
Application Number:
JP2014144761A
Publication Date:
February 04, 2016
Filing Date:
July 15, 2014
Export Citation:
Assignee:
MICRO ENGINEERING INC
International Classes:
B24B41/047; B24B7/22; H01L21/304
Attorney, Agent or Firm:
Masatake Suzuki