Title:
Grooving method and equipment
Document Type and Number:
Japanese Patent JP6341761
Kind Code:
B2
Inventors:
Tetsuya Hirano
Application Number:
JP2014114558A
Publication Date:
June 13, 2018
Filing Date:
June 03, 2014
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
B24B39/00; B24B41/06
Domestic Patent References:
| JP57149114A | ||||
| JP58045862A | ||||
| JP8261185A | ||||
| JP63272463A |
Attorney, Agent or Firm:
Masuo Oiwa
Takenaka Ikuo
Keigo Murakami
Kenji Yoshizawa
Takenaka Ikuo
Keigo Murakami
Kenji Yoshizawa
Previous Patent: A detecting device, a detecting method, a substrate transport device, a substrate processing device
Next Patent: HEAT TREATMENT OVEN
Next Patent: HEAT TREATMENT OVEN