Title:
薄膜蒸着のための５族金属化合物及びそれを用いた５族金属含有薄膜の形成方法
Document Type and Number:
Japanese Patent JP7214955
Kind Code:
B2
Abstract:
A group 5 metal compound according to an embodiment of the present disclosure is represented by any one of the following and :In and ,M is any one selected from group 5 metal elements,n is any one selected from an integer of 1 to 5,R1 is any one selected from a linear alkyl group having 3 to 6 carbon atoms and a branched alkyl group having 3 to 6 carbon atoms, andR2 and R3 are each independently any one selected from hydrogen, a linear alkyl group having 1 to 4 carbon atoms, and a branched alkyl group having 1 to 4 carbon atoms.
Inventors:
Lee, Tae Young
Ji, Sun Jun
Bike, Sun Young
Ji, Sun Jun
Bike, Sun Young
Application Number:
JP2021106782A
Publication Date:
January 31, 2023
Filing Date:
June 28, 2021
Export Citation:
Assignee:
EasyTM Company Limited
International Classes:
C07F9/00; C23C16/18; C23C16/44; H01L21/316; H01L21/318
Domestic Patent References:
| JP2010507729A |
Foreign References:
| KR1020130049020A | ||||
| WO2010040741A1 | ||||
| EP2573096A1 |
Other References:
Dalton Transactions,2003年,Vol.23,p.4457-4465
Polyhedron,1989年,Vol.8(13-14),p.1819-1820
Polyhedron,1989年,Vol.8(13-14),p.1819-1820
Attorney, Agent or Firm:
Patent Attorney Corporation RYUKA International Patent Office
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