Title:
GUN LENS AND PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP3558325
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To forcible dispose particles on an orbit around an optical axis and improve an aberration coefficient, spatial resolution and luminance by generating a deceleration field between an extraction electrode and an anode and generating a magnetic field convoluted on the extraction electrode and the anode by means of a capacitor lens.
SOLUTION: Given voltages are applied to a cathode 2, an extraction electrode 3, and an anode 4, respectively, and a deceleration field is generated between the extraction electrode 3 and the anode 4 to reduce the final energy of the particles to 3keV or less. Further, by means of a capacitor lens constituted by a single electrode lens, a given distribution is provided on the cathode 2, the extraction electrode 3, and the anode 4, and at the same time a magnetic field distribution 6 convoluted is generated in axial direction. When the cathode 2 is constituted as a thermal field emission electrode, a restraint electrode 7 is overlapped on the cathode 2. Thereby, a particle not directly emitted from a tip end of the cathode is restrained, an increase in dimensions of a virtual source is restrained, a decrease in intensity is prevented, reduction of an aberration coefficient is made possible, and resolution can be improved.
Inventors:
Jurgen Frosien
Stephan Lanio
Gerard Schönecker
Stephan Lanio
Gerard Schönecker
Application Number:
JP35187297A
Publication Date:
August 25, 2004
Filing Date:
December 22, 1997
Export Citation:
Assignee:
Advantest Corporation
International Classes:
H01J3/02; H01J37/063; H01J37/073; H01J37/06; H01J37/145; (IPC1-7): H01J37/063; H01J37/145
Domestic Patent References:
| JP6162979A | ||||
| JP3176953A | ||||
| JP2297852A | ||||
| JP62024545A |
Attorney, Agent or Firm:
Akihiro Ryuka
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