Title:
GYRO SENSOR, ELECTRONIC APPARATUS, AND MOBILE BODY
Document Type and Number:
Japanese Patent JP2023175892
Kind Code:
A
Abstract:
To provide a precise gyro sensor, an electronic apparatus, and a mobile body.SOLUTION: The gyro sensor includes: a substrate 2; a fixed unit 48 fixed to the substrate 2; a driven unit 40, driven along an X-plane parallel to a main surface 23 of the substrate 2; a mass unit 41 connected to the driven unit 40, the driven unit being displaced along a first axis; a detection unit 45 connected to the mass unit 41, the detection unit being rotatable around a Z-axis intersecting with the X-axis and being displacable along the Z-axis by a Coriolis force that acts on a rotational movement horizontal to the substrate 2, and an elastic unit 47, connecting the detection unit 45 and the fixed unit 48 to each other. The fixed unit 48 is arranged between the center of gravity G of the detection unit 45 and the mass unit 41 in planer view.SELECTED DRAWING: Figure 1
Inventors:
TAKIZAWA TERUO
Application Number:
JP2023171150A
Publication Date:
December 12, 2023
Filing Date:
October 02, 2023
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01C19/5747; B81B3/00
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura
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