To provide a gyroscopic sensor provided with good sensitivity and easiness of formation.
A support frame 1 and a base 2 arranged inside the support frame 1 are connected with first to fourth beams 3, 4, 5, 6. The first beam 3 and the second beam 4 are arranged on the same line through the base 2, while the third beam 5 and the fourth beam 6 are arranged on the same line through the base 2. The first beam 3 and the third beam 5 are arranged in parallel. First and second oscillator support shafts 8, 9 are formed so that they are on the same line through the base 2 and protrude from the side of the base 2. A first oscillator 11 is fixed at the tip of the first oscillator support shaft 8, while a second oscillator 12 is fixed at the tip of the second oscillator support shaft 9. A displacement detection section 13 for detecting the displacement of the base 2 is formed on the surface of the base 2.
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JP2001050751A | 2001-02-23 | |||
JP2000180182A | 2000-06-30 | |||
JPH10260043A | 1998-09-29 | |||
JPH10153432A | 1998-06-09 | |||
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JPH1172334A | 1999-03-16 | |||
JPH11281372A | 1999-10-15 | |||
JP2000055670A | 2000-02-25 | |||
JPH10325726A | 1998-12-08 |
Atsushi Maeda