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Patent Searching and Data


Title:
HARD CARBON FILM-COATED MEMBER
Document Type and Number:
Japanese Patent JP2000008155
Kind Code:
A
Abstract:

To improve the adhesion between an intermediate layer and a hard carbon film.

This member is the one obtd. by laminating plural film layers on a base material, in which the base material is selected from cemented carbides, cermet, steels, silicon nitride, zirconia, silicon carbide, alumina, aluminum alloys, magnesium alloys and titanium alloys, the outermost layer of the film layers is formed of a hard carbon layer, among the intermediate layers between the base material and the outermost layer, the intermediate layer internally connected with the outermost layer is composed of metallic carbide, nitride or carbonitride contg. one or plural kinds of metals selected from the groups 4, 5 and 6 metals, Si, Al and Ge, and the concn. of oxygen present on the boundary part between the outermost layer and this intermediate layer is controlled to 3 at.% by the maximum value and ≤2 at.% by the average value in the range of ±50 nm with the boundary as the standard.


Inventors:
ODA KAZUHIKO
Application Number:
JP17901398A
Publication Date:
January 11, 2000
Filing Date:
June 25, 1998
Export Citation:
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Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
B23B27/14; C23C14/06; C23C16/26; C23C16/27; C23C16/50; C23C28/04; (IPC1-7): C23C14/06; B23B27/14; C23C16/26; C23C16/50; C23C28/04
Attorney, Agent or Firm:
Bunji Kamata (2 outside)