Title:
硬質皮膜および硬質皮膜被覆部材
Document Type and Number:
Japanese Patent JP6905194
Kind Code:
B2
Abstract:
To provide a hard film which improves adhesion between a DLC film as an outermost layer and an intermediate layer as an underlayer thereof, and a hard film-coated member coated with the hard film.SOLUTION: A hard film 10 includes: a first layer containing Ti and Si; a second layer containing Ti, Si and C; and a third layer made of diamond-like carbon. The second layer is formed between the first layer and the third layer. The content of C in the second layer increases toward the third layer from the first layer. In the first layer, the content of Ti is 25 to 35 mass% (inclusive) and the content of Si is 65 to 75 mass% (inclusive).SELECTED DRAWING: Figure 1
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Inventors:
Takeshi Takai
Junichi Yamaguchi
Junichi Yamaguchi
Application Number:
JP2017202865A
Publication Date:
July 21, 2021
Filing Date:
October 19, 2017
Export Citation:
Assignee:
Fujikoshi Co., Ltd.
International Classes:
B32B9/00; B32B9/04; B32B15/04; B32B15/18; C23C28/04; F16C33/12
Domestic Patent References:
JP2000178736A | ||||
JP2006161075A | ||||
JP2000080474A | ||||
JP2000178738A |
Attorney, Agent or Firm:
Kosaku Umemoto
Akiko Okajima
Akiko Okajima