Title:
ハードマスク
Document Type and Number:
Japanese Patent JP6578092
Kind Code:
B2
Abstract:
This invention provides a composition containing an organometallic compound having a chromophore moiety in the metal polymer backbone which allows a wider range of n/k values such that substrate reflectivity can be controlled under various conditions.
Inventors:
Shintaro Yamada
Dayan Wang
Sabrina Wong
Kon Ryu
Chen-By Sue
Dayan Wang
Sabrina Wong
Kon Ryu
Chen-By Sue
Application Number:
JP2014179115A
Publication Date:
September 18, 2019
Filing Date:
September 03, 2014
Export Citation:
Assignee:
Rohm and Haas Electronic Materials LLC
International Classes:
C08L85/00; C07C49/92; C07D251/32; C08G79/14
Domestic Patent References:
| JP2005289885A | ||||
| JP2005247595A | ||||
| JP2006508377A | ||||
| JP2002053669A |
Other References:
FURUKAWA et al.,Electronic behavior of titanium oxid-carbon cluster composite material obtained by calcinating a titanium-O-phenylene hybrid copolymer,Material Technology,2005年,23(5),pp.348-350
OKADA et al.,Synthesis and electron transfer behavior of novel alternative titanium-organic moieties hybrid copolymers,Electrochemistry,2004年,72(2),pp.84-91
SUGITA et al.,Electrical and optical properties of organic-titanium hybrid polymer, poly(2,3-dicyanophenyl bis-2,4-pentanedionate titanium alkoxide),Chemical Physics Letters,2005年,416(1-3),pp.79-82
SYDORA et al.,Syntheses and electrochemistry of (p-XC6H4O)6W (1-X, X=H, CH3, OCH3, Cl, Br, OH, OCH2Ph) and (p-XC6H4O)5W(OC6H4OH) (X = H, CH3, OCH3, Cl, Br): an approach to electrocatalytic CH bond activation,Polyhedron,2004年,23(17),pp.2841-2856
SIMPURA et al.,Symmetric esters by Tischtschenko reaction of aldehydes catalyzed by bi- and tridentate catalysts derived from catechol or gallol, trimethylaluminum and isopropanol,Tetrahedron,2001年,57(49),pp.9867-9872
SEN et al.,Synthesis, structure, and reactivity of homoleptic cerium(IV) and cerium(III) alkoxides,Inorganic Chemistry,1992年,31(3),pp.473-479
OKADA et al.,Synthesis and electron transfer behavior of novel alternative titanium-organic moieties hybrid copolymers,Electrochemistry,2004年,72(2),pp.84-91
SUGITA et al.,Electrical and optical properties of organic-titanium hybrid polymer, poly(2,3-dicyanophenyl bis-2,4-pentanedionate titanium alkoxide),Chemical Physics Letters,2005年,416(1-3),pp.79-82
SYDORA et al.,Syntheses and electrochemistry of (p-XC6H4O)6W (1-X, X=H, CH3, OCH3, Cl, Br, OH, OCH2Ph) and (p-XC6H4O)5W(OC6H4OH) (X = H, CH3, OCH3, Cl, Br): an approach to electrocatalytic CH bond activation,Polyhedron,2004年,23(17),pp.2841-2856
SIMPURA et al.,Symmetric esters by Tischtschenko reaction of aldehydes catalyzed by bi- and tridentate catalysts derived from catechol or gallol, trimethylaluminum and isopropanol,Tetrahedron,2001年,57(49),pp.9867-9872
SEN et al.,Synthesis, structure, and reactivity of homoleptic cerium(IV) and cerium(III) alkoxides,Inorganic Chemistry,1992年,31(3),pp.473-479
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office