Title:
HEAT INSULATION UNIT AND THERMAL TREATMENT DEVICE INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2015021598
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heat insulation unit having excellent durability, and a thermal treatment device including the same.SOLUTION: A heat insulation unit 11 includes a heat insulation body 21 comprising silica and alumina, and a heat generation body 22 provided on the inner wall surface of the heat insulation body 21. On the inner wall surface of the heat insulation body 21, plural recess parts 21a are provided in the circumferential direction thereof. The heat generation body 22 is arranged in the recess part 21a so that a part of the heat generation body 22 is exposed from the inner wall surface of the heat insulation body 21. The heat insulation body 21 is formed so that the content of alumina is 65 wt.% or more.
Inventors:
KOBAYASHI MAKOTO
Application Number:
JP2013152265A
Publication Date:
February 02, 2015
Filing Date:
July 23, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F16L59/02; F27B5/14; H01L21/205; H01L21/31; H01L21/324; H05B3/12
Domestic Patent References:
| JPH0269932A | 1990-03-08 | |||
| JPH07301793A | 1995-11-14 | |||
| JP2001183070A | 2001-07-06 | |||
| JPH0474299U | 1992-06-29 | |||
| JPH05504227A | 1993-07-01 | |||
| JP2003314965A | 2003-11-06 | |||
| JP3148001U | 2009-01-29 |
Attorney, Agent or Firm:
Mitsuru Kimura